Low threshold voltage anti-fuse device

G - Physics – 11 – C

Patent

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Details

G11C 17/08 (2006.01) H01L 21/77 (2006.01)

Patent

CA 2646367

A one time programmable memory cell having an anti-fuse device with a low threshold voltage independent of core circuit process manufacturing technology is presented. A two transistor memory cell having a pass transistor and an anti-fuse device, or a single transistor memory cell having a dual thickness gate oxide, are formed in a high voltage well that is formed for high voltage transistors. The threshold voltage of the anti- fuse device differs from the threshold voltages of any transistor in the core circuits of the memory device, but has a gate oxide thickness that is the same as a transistor in the core circuits. The pass transistor has a threshold voltage that differs from the threshold voltages of any transistor in the core circuits, and has a gate oxide thickness that differs from any transistor in the core circuits. The threshold voltage of the anti-fuse device is lowered by omitting some or all of the threshold adjustment implants that is used for high voltage transistors fabricated in the I/O circuits.

L'invention concerne une cellule de mémoire non reprogrammable ayant un dispositif anti-fusible avec une basse tension de seuil indépendante de la technologie de fabrication du processus du circuit central. Une cellule de mémoire à deux transistors ayant un transistor de chute et un dispositif anti-fusible, ou une cellule de mémoire à un transistor ayant un oxyde de grille à double épaisseur, est formée dans un puits à haute tension qui est formé pour des transistors à haute tension. La tension de seuil du dispositif anti-fusible diffère des tensions de seuil de tout transistor dans les circuits centraux du dispositif de mémoire, mais a une épaisseur d'oxyde de grille semblable à un transistor dans les circuits centraux. Le transistor de chute a une tension de seuil qui diffère des tensions de seuil de tout transistor dans les circuits centraux, et a une épaisseur d'oxyde de grille qui diffère de celle de tout transistor dans les circuits centraux. La tension de seuil du dispositif anti-fusible est abaissée en omettant certains ou tous les implants de réglage du seuil utilisés pour les transistors à haute tension fabriqués dans les circuits d'entrée-sortie.

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