H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/477 (2006.01) C25D 11/32 (2006.01) H01L 21/47 (2006.01)
Patent
CA 2413704
A porous silicon structure is stabilized by anodically oxidizing the structure and then subjecting it to chemical functionalization to protect non-oxidized surface regions, preferably in the presence of 1-decene under thermal conditions. This process creates a protective organic monolayer on the surface of the structure, rendering it highly stable.
Une structure poreuse en silicium est stabilisée par oxydation anodique de la structure, puis en soumettant celle-ci à une fonctionnalisation chimique pour protéger les régions de la surface non oxydées, de préférence en présence de déc-1-ène dans des conditions thermiques. Ce procédé crée une monocouche organique protectrice à la surface de la structure, la rendant hautement stable.
Boukherroub Rabah
Koshida Nobuyushi
Lockwood David John
Wayner Danial D. M.
Marks & Clerk
National Research Council
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