H - Electricity – 01 – J
Patent
H - Electricity
01
J
358/24
H01J 3/00 (2006.01) G21K 1/093 (2006.01)
Patent
CA 1116320
ABSTRACT OF THE DISCLOSURE In a magnetic deflection system for deflecting a beam of charged particles, through a given beam bending angle at least four beam deflecting stations arc serially arranged along the beam path for bending the beam through the beam bending angle f, Each of the beam bending stations includes a magnet for producing a static magnetic field component of a strength and of a shape so that the beam is deflected free of transverse geometric aberrations of second order. The beam deflection system also in- cludes sextupole magnetic field components of such a strength and location so as to eliminate second order chromatic aberrations of the deflected beam without introducing second order geometric aberrations, whereby a magnetic beam deflection system is provided which is free of both transverse chromatic a geometric aberrations of second order.
324216
R. William Wray & Associates
Varian Associates Inc.
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