C - Chemistry – Metallurgy – 30 – B
Patent
C - Chemistry, Metallurgy
30
B
C30B 15/00 (2006.01) C30B 15/30 (2006.01)
Patent
CA 2432396
An apparatus and method is provided for manufacturing a semiconductor substrate such as web crystals. The apparatus includes a chamber.and a growth hardware assembly housed within the chamber.A magnetic field system produces a vertical magnetic field within the chamber.
L'invention concerne un appareil et un procédé pour fabriquer un substrat de semi-conducteur, tel que des cristaux de type web. L'appareil comporte une chambre, dans laquelle est logé un ensemble de matériel de croissance. Un système de champ magnétique produit un champ magnétique vertical à l'intérieur de la chambre.
Fujita Kentaro
Glavish Hilton F.
Isozaki Hideyuki
Keiji Maishigi.
Ebara Corporation
Ebara Solar Inc.
Fetherstonhaugh & Co.
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