Magnetic field shield including a superconductive film

Details Magnetic field shield including a superconductive film Magnetic field shield including a superconductive film

G - Physics

12

B

317/3, 347/7, 20

G12B 17/02 (2006.01) H01L 39/00 (2006.01) H01L 39/24 (2006.01) H05K 9/00 (2006.01)

Patent

CA 1300253

ABSTRACT OF THE DISCLOSURE A magnetic field shield including a superconductive film characterized in that the magnetic field shield comprises a superconductive film layer constituted primarily of mixed crys- talline body of niobium nitride and titanium nitride laminated on a metal substrate, that the magnetic field further comprises a niobium-titanium alloy layer or a metal film layer in the above lamination, that the magnetic field comprises a plurality of the above-mentioned layers, and that the magnetic field has a plural- ity of small holes passing through the layers in the direction of the thickness. The magnetic field shield of the present inven- tion produces an excellent magnetic field shielding effect due to a superconductive characteristic peculiar to the superconductive film layer constituted primarily by a mixed crystalline body of niobium nitride and titanium nitride. The cooling effect of the metal substrate maintains the magnetic field shielding effect at a high level. In addition, due to use of the niobium-titanium alloy layer, the magnetic field shield has high resistance against peeling, greatly increasing the practical usefulness of the magnetic field shield. In case of the magnetic field shield with a plurality of the laminated layers, the cooling effect of the metal film layers included in the multiple layers stably maintains the magnetic field shielding effect of the superconduc- tive film layers. In the case of the magnetic field shield with small holes, the electromagnetic shielding and cooling effects of the holes are added to further strenghthen the maynetic field shielding effect.

581779

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