Magnetic gas gate

Details Magnetic gas gate Magnetic gas gate

H - Electricity

01

L

345/22

H01L 31/04 (2006.01) C23C 16/54 (2006.01) F16J 15/16 (2006.01) H01L 31/075 (2006.01) H01L 31/20 (2006.01)

Patent

CA 1186787

ABSTRACT A magnetic gas gate adapted to operatively connect two adjacent dedicated chambers, in the first chamber of which a first layer is deposited upon a magnetic web of substrate material and in the second chamber of which a second layer is deposited onto the first layer. The first chamber has introduced thereinto gas constituents used to form the first layer while the second chamber (1) has introduced thereinto gas constituents used to form the second layer which constituents include at least one gas not introduced into the first chamber; and (2) is operatively associated with a mechanism for unidirectionally drawing the gases from the first chamber side of the gas gate toward the second chamber side of the gas gate. It is important that the second chamber gas constituents be substantially prevented from backflowing or diffusing through the gas gate to contaminate the gas constituents in the first chamber, To prevent contamination of the first chamber constituents from the second chamber gas constituents, the present invention substantially reduces the size of the passageway through the gas gate by creating a magnetic field adapted to urge the unlayered surface of the magnetic substrate into sliding contact with one of the walls of the passageway. Since the size of the gas gate passageway is re- duced, the backflow of gas constituents from the second chamber is correspondingly reduced, thereby providing for the production of a more efficient product. The magnetic gas gate of the present invention provides the additional benefit of re- ducing warpage of the magnetic web of substrate material which also results in the production of a more efficient product.

426993

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