Magnetic thin film

Details Magnetic thin film Magnetic thin film

H - Electricity

01

F

31/133, 352/29.2

H01F 10/20 (2006.01) C23C 14/06 (2006.01) C23C 30/00 (2006.01) G11B 5/147 (2006.01) H01F 10/14 (2006.01) H01F 10/18 (2006.01) G11B 5/31 (2006.01)

Patent

CA 1255890

ABSTRACT A magnetic thin film consisting essentially of Fe, Al and Si and further containing oxygen has high magnetic permeability and high hardness without lowering the magnetic properties such as saturation magnetic flux density or coercive force. The magnetic thin film has an increased specific resistivity and a lowered eddy current loss in the high frequency region and is suitable for a core material of magnetic transducer heads used in a high frequency region. The magnetic thin film is prepared by, for example, physical vapor deposition or ion implantation.

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