Magnetically enhanced sputtering device including means for...

Details Magnetically enhanced sputtering device including means for... Magnetically enhanced sputtering device including means for...

H - Electricity

01

J

204/167.2

H01J 37/34 (2006.01)

Patent

CA 1153733

ABSTRACT OF THE DISCLOSURE Magnetically enhanced sputtering device including first and second magnets disposed adjacent opposite sides of the target where one of the magnets projects a field over the target surface and through the magnet on the other side, the magnets preferably comprising contacting layers of oriented ferrite impregnated tape. Included is magnetic structure for establishing a magnetic bridge circuit for sputtering magnetically permeable targets. Also included is magnetic structure where a third magnet is disposed beneath the cathode and the fields generated by the first and second magnets pass through the third magnet to enhance the parallelism of the field with respect to the target.

349015

Affiliated with

Also associated with

Rating

Magnetically enhanced sputtering device including means for... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Magnetically enhanced sputtering device including means for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Magnetically enhanced sputtering device including means for... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-462344