Magnification compensation apparatus

Details Magnification compensation apparatus Magnification compensation apparatus

H - Electricity

01

J

358/10.1

H01J 37/21 (2006.01) H01J 37/256 (2006.01)

Patent

CA 1308203

Abstract of the Disclosure The present invention relates to an apparatus for generating a magnification compensation signal for use in a scanning electron microscope. The apparatus includes an electron beam generator that generates a beam at a predetermined energy level in accordance with a beam energy signal. The apparatus allows for refocussing by varying the beam energy signal about a nominal value corresponding to the predetermined energy level. The apparatus also provides a magnification compensator producing a magnification compensation signal that varies in accordance with the variation of the beam energy signal from the predetermined energy level.

601466

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