Maintenance strategy control system for gas discharge lasers

Details Maintenance strategy control system for gas discharge lasers Maintenance strategy control system for gas discharge lasers

G - Physics

01

R

G01R 31/00 (2006.01) H01S 3/10 (2006.01) H01S 3/225 (2006.01)

Patent

CA 2196130

A diagnostic sub-routine for use by the control system of a gas discharge laser is disclosed. The sub-routine provides a prediction of the time remaining,based upon real-time laser system operations, for each pulse limited sub-system within the laser. The sub-routine utilizes a calculated average pulse repetitionrate over a user-defined time interval as the basis for predicting the time remaining, under current operating conditions, until the end-of-life for each pulse-limited sub-system; and continually updates the time prediction to account for changes in the lasers operation. The predicted time is reported to the operator to allow advanced scheduling of routine maintenance.

ous-programme de diagnostic à l'usage du système de contrôle d'un laser à gaz. Le sous-programme permet de prévoir le temps qui reste, en fonction des opérations du système laser en temps réel, pour chaque sous-système limité en impulsions du laser. Le sous-programme utilise un taux moyen de répétition des impulsions pendant un intervalle défini par l'utilisateur comme base de prévision du temps qui reste, dans des conditions d'opération courantes, jusqu'à la fin de vie de chaque sous-système limité en impulsions; et met à jour continuellement la prévision de temps en fonction des modifications du fonctionnement des lasers. Le temps prévu est indiqué à l'opérateur pour permettre de planifier la maintenance périodique.

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