Manufacture of a group of infra-red detector elements, and a...

Details Manufacture of a group of infra-red detector elements, and a... Manufacture of a group of infra-red detector elements, and a...

H - Electricity

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H01L 31/18 (2006.01) H01L 21/465 (2006.01) H01L 21/467 (2006.01) H01L 25/04 (2006.01) H01L 27/146 (2006.01)

Patent

CA 1143461

1 PHB. 32,630. ABSTRACT: A group of infra-red radiation detector elements are manufactured from a body of infra-red sensitive materials on an insulating substrate using two masking steps which do not require critical alignment even with close spacing between the elements. A first masking layer e.g. of photoresist is formed on the upper surface of at least the body to determine by a lift-off technique a metal- lization pattern on the body and the substrate. A second masking layer e.g. of photoresist is then provided to determine by ion-bombardment through windows of this layer the desired pattern of elements and their electrodes. The ion-bombardment permits removal of exposed areas of not just the body and metallization pattern but also of a pas- sivating layer on the body surfaces; a closely spaced group of elements and their electrodes can be obtained because the ion-bombardment results in steep sides with- out significant undercutting.

332582

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