Manufacture of a micromechanical element with two degrees of...

Details Manufacture of a micromechanical element with two degrees of... Manufacture of a micromechanical element with two degrees of...

G - Physics

03

F

G03F 7/00 (2006.01) B23P 11/00 (2006.01) B23P 15/00 (2006.01) C03C 15/00 (2006.01) C23F 1/02 (2006.01) H01H 1/00 (2006.01) H01L 21/306 (2006.01)

Patent

CA 2063508

A method of fabricating a micromechaincal structure of a rod enclosed by a casing and able to both slide and rotate in the casing is described. The rod is formed on a substrate by growing a cylinder into a wall. The wall is then removed leaving the cylinder. The cylinder is coated with a sacrificial layer and a structural layer. The structural layer is patterend to form the casing and the sacrificial layer is removed.

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