Manufacture of hollow bodies of semiconductor material

Details Manufacture of hollow bodies of semiconductor material Manufacture of hollow bodies of semiconductor material

C - Chemistry, Metallurgy

01

B

356/109

C01B 15/00 (2006.01) C01B 17/00 (2006.01) C01B 31/36 (2006.01) C01B 33/02 (2006.01) C23C 16/01 (2006.01) C23C 16/24 (2006.01)

Patent

CA 912704

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