Manufacture of semiconductor insulating films by...

Details Manufacture of semiconductor insulating films by... Manufacture of semiconductor insulating films by...

H - Electricity

01

L

356/178, 204/97.

H01L 21/20 (2006.01) H01L 21/314 (2006.01) H01L 21/316 (2006.01)

Patent

CA 1047171

ABSTRACT Manufacture of semiconductor devices in which a glass coating is provided on a semiconductor slice by means of electrophoresis from a dispersion of glass particles in a carrier liquid. A dispersion of the glass particles is used with a specific conductivity of at most 10-10 ohm-1 cm-1.

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