Manufacture of silicon metal from a mixture of chlorosilanes

Details Manufacture of silicon metal from a mixture of chlorosilanes Manufacture of silicon metal from a mixture of chlorosilanes

C - Chemistry, Metallurgy

23

C

117/85

C23C 16/24 (2006.01) C01B 33/02 (2006.01) C30B 25/02 (2006.01)

Patent

CA 955808

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