H - Electricity – 01 – L
Patent
H - Electricity
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L
H01L 21/00 (2006.01) C30B 15/00 (2006.01) C30B 33/00 (2006.01) H01L 21/02 (2006.01) H01L 21/322 (2006.01) H01L 21/70 (2006.01)
Patent
CA 2171375
In a heat history initializing step, a heat treatment in performed in an atmosphere including at least one of hydrogen, helium, and argon while the temperature is increased in a range of 700°C to 1,000°C at a rate of 15-1,000°C/min. In a controlled nuclei growing step, a heat treatment is performed in the above atmosphere while the temperature is kept constant in a range of 850°C to 980°C for 0.5-60 minutes.
Chaki Katsuhiro
Hayashi Kenro
Saito Hiroyuki
Takeda Ryuji
Xin Ping
Covalent Materials Corporation
Riches Mckenzie & Herbert Llp
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