G - Physics – 03 – F
Patent
G - Physics
03
F
96/266
G03F 7/30 (2006.01) G02B 5/18 (2006.01) G03F 7/40 (2006.01)
Patent
CA 2029674
The method of manufacturing an optical diffraction grating element, in which a diffraction grating having a serrated profile is formed upon a glass substrate through an ion beam etching method, is characterized in adopting an ion beam made from a gas chemically reacting with the glass substrate. Also, when manufacturing an optical diffraction grating element that is divided into a plurality of regions wherein diffraction gratings having different diffraction angles with respect to an incident light are provided, the method of the present invention is characterized in forming slits into a resist film disposed upon a transparent substrate such as a glass substrate, in accordance with the patterns of the diffraction gratings, such that the width of the slits is constant irrespectively of the regions. Accordingly, the method of manufacturing an optical diffraction grating element of the present invention enables an improvement of diffraction efficiency of the optical diffraction grating element, and enhancement of the optical efficiency of an optical head device. The SN ratio of the output signals released by the optical head device may be thus improved and the servo error control executed accurately.
Kubo Katsuhiro
Kurata Yukio
Sakai Keiji
G. Ronald Bell & Associates
Sharp Kabushiki Kaisha
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