Manufacturing method of semiconductor laser

Details Manufacturing method of semiconductor laser Manufacturing method of semiconductor laser

H - Electricity

01

S

H01S 5/223 (2006.01) H01S 5/227 (2006.01) H01S 5/22 (2006.01) H01S 5/343 (2006.01)

Patent

CA 2309401

A manufacturing method of a semiconductor laser is provided, in which an uppermost surface of an electric current blocking buried structural portion can be formed in flat without making electric current blocking characteristics worse, and element characteristics can be improved in quality. Therefore, the surface migration length of a group III material species is controlled by respectively changing a pressure of the group V material, a growth temperature or both the pressure of the group V material and the growth temperature from an initial pressure and an initial temperature in an growing intermediate step of selectively forming an electric current blocking layer 4 of the semiconductor laser by a atmospheric pressure MOVPE method. Thus, the uppermost surface of a buried structural portion is formed in flat.

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