Marching interconnecting lines in semiconductor integrated...

Details Marching interconnecting lines in semiconductor integrated... Marching interconnecting lines in semiconductor integrated...

H - Electricity

01

L

356/134, 352/82

H01L 23/52 (2006.01) H01L 23/522 (2006.01) H01L 23/528 (2006.01)

Patent

CA 1305255

-8- MARCHING INTERCONNECTING LINES IN SEMICONDUCTOR INTEGRATED CIRCUITS Abstract In order to reduce parasitic capacitive cross-coupling in an integrated circuit, metallization lines in an array--for example, an array of word lines, of bit lines, or of bus interconnects-are geometrically arranged in a systematically progressive marching sequence, whereby the identity of the lines located on either side of a given line keeps changing.

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