G - Physics – 06 – K
Patent
G - Physics
06
K
354/70
G06K 9/32 (2006.01) B41M 1/06 (2006.01) G06K 7/10 (2006.01) H01J 37/304 (2006.01)
Patent
CA 1137633
A MARK SIGNAL AMPLIFIER Abstract of the Disclosure This invention relates to a mark signal amplifier for use in apparatus for electron-beam lithography. It includes a first circuit for taking maximum and minimum values out of a mark signal that is detected by causing an electron beam to scan a mark area provided on a sample. A second circuit determines a peak-peak value of an amplitude of the detected mark signal in accordance with the maximum and minimum values, and a third circuit sends an output signal of a constant amplitude level to a binary- coding circuit in accordance with the peak-peak value in spite of fluctuations of the detected mark signal. The arrangement enables a higher accuracy than hitherto to be obtained in detecting the mark positioning.
339489
Hamamoto Nobuo
Ichino Kazuo
Moriya Shigeru
Ozawa Kanji
Hitachi Ltd.
Kirby Eades Gale Baker
Nippon Telegraph & Telephone Public Corporation
LandOfFree
Mark signal amplifier does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Mark signal amplifier, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mark signal amplifier will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-674718