Mask flow method of forming a variable width channel

Details Mask flow method of forming a variable width channel Mask flow method of forming a variable width channel

H - Electricity

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356/151, 345/32

H01S 5/12 (2006.01) H01L 21/027 (2006.01) H01L 21/308 (2006.01) H01S 5/223 (2006.01) H01S 5/24 (2006.01)

Patent

CA 1267712

RCA 80,179 MASK FLOW METHOD OF FORMING A VARIABLE WIDTH CHANNEL ABSTRACT OF THE DISCLOSURE A method of forming a channel of varying width in a body comprises the steps of forming a plurality of masking elements having an opening therethrough intersecting a plurality of the elements on a surface of the body, partially flowing the elements into the opening to form a masking pattern having a variable width opening therethrough, and removing portions of the exposed body to form the channel with a sidewall having a surface contour corresponding to an edge of the masking pattern.

510919

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