Mask for optical exposure

Details Mask for optical exposure Mask for optical exposure

H - Electricity

01

L

356/177

H01L 21/467 (2006.01) G03F 1/14 (2006.01)

Patent

CA 1070855

ABSTRACT OF THE DISCLOSURE A mask for optical exposure including a transparent supporting plate, a transparent conformable film having a pre- determined opaque pattern formed thereon, and a penetrating hole formed through the transparent supporting plate, in which the transparent conformable film is attached to the transparent supporting plate so that a gas-tight space is formed between them, and the external of the transparent supporting plate is communicated with the gas-tight space through the penetrating hole. -1-

287526

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