Mask for patterning electrode structures in thin film el...

H - Electricity – 05 – K

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356/22, 356/7

H05K 3/10 (2006.01) C04B 41/45 (2006.01) C04B 41/81 (2006.01) C23C 14/04 (2006.01) C23C 16/04 (2006.01) H05B 33/26 (2006.01) H05B 33/28 (2006.01) H05K 3/14 (2006.01)

Patent

CA 1247256

D-85-1-054 - 18 - PATENT MASK FOR PATTERNING ELECTRODE STRUCTURES IN THIN FILM EL DEVICES ABSTRACT A shadow mask is provided which can provide a precise patterning to a deposit at process temperature without destruction of the shadow mask itself. The shadow mask consists of a plurality of metallic strips having a series of interconnecting small arched bridges that hold the strips of the mask together. The shadow mask is used in a process for depositing electrode structures in an electroluminescent device wherein the mask is positioned over a substrate surface to be coated and deposit electrode material is sprayed from a geometrically broad source, through the mask and onto the substrate. Deposition occurs beneath the arched bridges resulting in a pattern deposition that does not readily reveal the presence of bridges because sufficient material is coated beneath to provide cosmetic and electrical continuity between areas separated by the bridges. This invention is particularly suited for a mask designed to provide a fine pattern of closely spaced parallel lines or electrode structures. 0287D

519973

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