H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/027 (2006.01) G03F 1/14 (2006.01)
Patent
CA 2154600
An opening end face of a frame is closed by a transparent thin film, a vent is formed in the frame, and a filter having a filtration area larger than the sectional area of the vent is mounted to the frame to cover the vent. The filtration area of the filter an effective area where allows the passage of gas in the filter. Then, the filter is mounted to the frame so that there is a certain space between the frame and the filter. In the conventional device, since the filter is directly mounted to the frame without space between the filter and the frame, the filtration area of the filter is substantially the same as the sectional area of the vent. In case of mounting the filter apart from the frame, however, the filtration area of the filter can be lager than the sectional area of the vent so that the quantity of gas flow is greater than that of the conventional one. Therefore, its adaptability to the changes in atmospheric pressure and in temperature is also improved.
L'ouverture d'un cadre est fermée par une pellicule mince transparente, le cadre comprenant un évent protégé par un filtre dont la section filtrante est supérieure à la section de l'évent. La section filtrante du filtre est la section efficace qui laisse passer du gaz. Le filtre est monté sur le cadre légèrement en retrait de celui-ci. Dans un dispositif classique dont le filtre est monté directement sur le cadre sans espacement par rapport à celui-ci, la section filtrante est sensiblement égale à la section de l'évent. En montant le filtre légèrement en retrait, sa section filtrante peut être supérieure à la section de l'évent, ce qui a pour effet de permettre le passage d'une plus grande quantité de gaz. Par conséquent, l'adaptabilité du dispositif aux variations de pression atmosphérique et de température s'en trouve améliorée.
Fujita Minoru
Nakagawa Hiroaki
Kirby Eades Gale Baker
Mitsui Chemicals Incorporated
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