Mass analyzer system with reduced drift

H - Electricity – 01 – J

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H01J 49/06 (2006.01) G01N 27/62 (2006.01) H01J 49/02 (2006.01) H01J 49/04 (2006.01) H01J 49/10 (2006.01)

Patent

CA 1245778

TITLE: MASS ANALYZER SYSTEM WITH REDUCED DRIFT ABSTRACT OF THE DISCLOSURE A mass analyzer in which an ion signal, typi- cally from a plasma, travels through an orifice into a vacuum chamber, and through a focussing system in the vacuum chamber into a mass spectrometer and ion detect- or. Drift of the detected ion signal, and differences in drift of the detected ion signal for different elements, are greatly reduced by a small shadow stop placed in the vacuum chamber immediately behind the orifice. The shadow stop and plate containing the orifice are both preferably grounded. The focussing system includes a Bessel box lens, and drift is further reduced by insu- lating the stop in the Bessel box lens from the barrel and biasing the Bessel stop differently from the barrel.

493741

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