Mass flowmeter for a gaseous medium, for example air

Details Mass flowmeter for a gaseous medium, for example air Mass flowmeter for a gaseous medium, for example air

G - Physics

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G01F 1/86 (2006.01) G01F 1/38 (2006.01) G01F 1/40 (2006.01) G01F 1/88 (2006.01)

Patent

CA 1046790

ABSTRACT A mass flow meter for a gas, for example air, having a measuring lead in which a laminar restriction is incorporated and within which lead are arranged centrally an absolute pressure transducer and a pressure differential transducer each constituted by a diaphragm of a semiconductor material which on one side is provided with electric resis- tance elements by surface doping with a substance, at least one of said elements constituting a strain gauge.

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