Mass-sensitive sensor

Details Mass-sensitive sensor Mass-sensitive sensor

G - Physics

01

N

G01N 29/02 (2006.01)

Patent

CA 2389894

The invention relates to a mass-sensitive sensor comprised of an acoustic surface wave component based on shear waves. The aim of the invention is to design the mass-sensitive sensor of the aforementioned type such that, in the instance of increased sensitivity, the sensitive aluminum structures of the sensor are sufficiently protected against corrosion. To this end, the active surface of the sensor supports two different layers of which one is a parylene layer having a thickness between 0.2 and < 1.6 µm, whereby this parylene layer serves to generate Love waves, and the other is a wear layer which interacts with an analyte contained in a medium.

L'invention concerne un détecteur sensible à la masse, qui comprend un composant acoustique à ondes de surface à base d'ondes de cisaillement. L'invention vise à concevoir le détecteur sensible à la masse du type précité, de manière qu'en cas de sensibilité accrue, les structures aluminium sensibles du détecteur soient suffisamment protégées contre la corrosion. A cet effet, il est prévu que la surface active du détecteur porte deux différentes couches, une couche de parylène d'une épaisseur comprise entre 0,2 et < 1,6 µm, cette couche de parylène servant à produire des ondes de Love, et une couche d'usure qui coopère avec un analyte contenu dans un milieu.

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