Master plate of optical memory device and manufacturing...

G - Physics – 11 – B

Patent

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G11B 7/26 (2006.01) G11B 7/007 (2006.01)

Patent

CA 2087108

A master plate of an optical memory device has a substrate having on a surface thereof a plurality of guiding grooves with a predetermined interval. The respective edge portions of the guiding grooves are inclined with respect to the surface of the substrate at an angle not more than 30°. According to a manufacturing method for the master plate, the post-baking process is carried out at a baking temperature of not less than 150°C, and an etching gas containing °2 gas of 4 (SCCM) to 10 (SCCM) is used. Thus, even when the copying is carried out with respect to the substrate of the optical memory device according to the injection molding process, wherein the stamper used is manufactured based on the above-mentioned master plate, the mold release of the stamper can be carried out without being caught by the substrate. Thus, it is possible to keep the respective shapes of the guiding grooves of the stamper, thereby enabling the substrate of the optical memory device to be manufactured with high repeatability.

Cette invention concerne un disque optique original qui comporte sur une face une série de sillons de guidage à intervalles prédéterminés. Les deux bords des sillons sont inclinés par rapport à la surface du substrat selon un angle d'au plus 30 degrés. Selon la méthode de fabrication utilisée, la post-cuisson se fait à une température d'au moins 150 degrés Celsius la gravure se fait avec un gaz de gravure oxygéné dont le débit se situe entre 4 et 10 cm3 standard par minute. Ainsi, même lorsque la copie se fait par moulage par injection à partir d'une matrice de pressage obtenue du disque original ci-dessus, le démoulage de ladite matrice peut se faire sans accrocher le substrat du disque original. Ainsi, on parvient à préserver les formes des sillons de guidage de la matrice pour une reproduction fidèle en grande série du disque optique.

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