Material evaporation chamber with differential vacuum pumping

Details Material evaporation chamber with differential vacuum pumping Material evaporation chamber with differential vacuum pumping

C - Chemistry, Metallurgy

23

C

C23C 14/24 (2006.01) C23C 14/56 (2006.01) C30B 23/02 (2006.01) C30B 35/00 (2006.01)

Patent

CA 2489602

The invention relates to a material evaporation chamber, comprising a vacuum chamber (10) and a first pumping unit (13) for pumping said chamber and material sources. According to the invention, a wall (23), which can provide a total or partial vacuum seal, divides said chamber into a first volume (25) and a second volume (22). Certain material sources (17) with a principal axis (18) are placed in the second volume (22). Said second volume (22) is pumped by a second pumping unit (24). The wall (23) comprises apertures (26) which are each centered on the principal axis (18) of one of the material sources (17). The evaporation chamber further comprises means (27) for blocking or opening each of said apertures (26), said means (27) being controlled individually to protect the material sources (17) having an unused principal axis (18).

L'invention concerne une chambre d'évaporation de matériaux comprenant une chambre à vide (10), une première unité de pompage (13) pour pomper ladite chambre et des sources de matériau. Selon l'invention, une paroi (23) pouvant assurer une étanchéité totale ou partielle au vide, délimite au sein de cette chambre un premier volume (25) et un deuxième volume (22). Certaines sources de matériau (17) ayant un axe principal (18) sont placées dans le deuxième volume (22). Ce deuxième volume (22) est pompé par une deuxième unité de pompage (24). La paroi (23) comporte des évidements (26) qui sont chacun centrés sur l'axe principal (18) d'une des sources de matériau (17). La chambre d'évaporation comprend également des moyens (27) pour obturer ou dégager chacun desdits évidements (26), lesdits moyens (27) étant contrôlés individuellement pour protéger les sources de matériau (17) ayant un axe principal (18) non utilisées.

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