Materials for chemical vapor deposition processes

Details Materials for chemical vapor deposition processes Materials for chemical vapor deposition processes

B - Operations, Transporting

32

B

B32B 9/00 (2006.01) C04B 41/50 (2006.01) C04B 41/52 (2006.01) C04B 41/85 (2006.01) C04B 41/89 (2006.01) C23C 16/00 (2006.01) C23C 16/44 (2006.01) C23C 16/458 (2006.01)

Patent

CA 2082819

In chemical vapor deposition processes, reactor and/or material handling parts and/or furniture comprise carbon fiber reinforced carbon matrix material. Silicon may serve as a precoat to the deposition of a further refractory or other protective coat- ing. A method of coating a carbonaceous body is provided, including depositing a coating of silicon and depositing on the sili- con-coated body a coating of a protective or refractory material chemically compatible with silicon.

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