Means for providing uniform illumination to a light...

Details Means for providing uniform illumination to a light... Means for providing uniform illumination to a light...

G - Physics

03

B

356/187, 88/94

G03B 27/72 (2006.01) G03F 7/20 (2006.01)

Patent

CA 1174493

MI-2813 ABSTRACT OF THE DISCLOSURE MEANS FOR PROVIDING UNIFORM ILLUMINATION TO A LIGHT SENSITIVE ELEMENT In a ring field projection optical system for imaging a mask on a wafer the illumination source has readily adjustable means for obtaining uniform exposure along the length of the arcuate zone of illumination.

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