G - Physics – 01 – M
Patent
G - Physics
01
M
G01M 3/20 (2006.01) G01M 3/02 (2006.01) H01J 49/14 (2006.01)
Patent
CA 2163285
In a mass spectrometer leak detector an ion source assembly is disposed in a cavity of a vacuum envelope and is surrounded by a thin removable liner which has means for positioning this liner within the cavity. The liner positioning means limit the thermal contact of the liner with the vacuum envelope and due to heat-radiation relationship of the liner with the ion source the temperature of the ion source region increases and contamination of the ion source decreases.
R. William Wray & Associates
Varian Inc.
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