Measuring device

Details Measuring device Measuring device

G - Physics

01

H

73/58

G01H 9/00 (2006.01) G01D 5/26 (2006.01) G01L 9/00 (2006.01)

Patent

CA 1334630

The magnitudes of physical variables are sensed by measuring the resonant frequency of a vibratable structure (15). The structure (15) is of micromechanical form, conveniently etched from a wafer of semi conductor material (6), and is caused to vibrate by incident optical energy delivered via fibre optic wave guides (20) from a source (10) such as a laser (31).

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