Measuring instrument for reflectometric measurements

G - Physics – 01 – N

Patent

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Details

G01N 21/47 (2006.01) G01N 21/33 (2006.01)

Patent

CA 2181710

A measuring instrument for reflectometric measurements, comprising a spherical measuring chamber (1) provided with a light source (2) and with a specimen aperture (3); a measuring channel (4) which has been provided with optics (5), with a photometer (6), with an optional stop (7) and with an optional filter (8); a reference channel (14) provided with optics (15), with a photometer (16), with an optional stop (17) and with an optional filter (18); an d a signal processing and calculating device (20s, 20c) for processing and comparing with each other the light intensity values observed by means of the photometers in the measuring and reference channels. As taught by the invention, the measuring instrument comprises at least one visible light light source (2s) which emits substantially light having a wavelength mainly over about 380 nm, and a UV light source (2u) which emits substantially light in the UV range having a wavelength mainly under about 380 nm, advantageously 300 to 380 nm.

Instrument de mesure réflectométrique comportant une chambre sphérique de mesure (1) pourvue d'une source de lumière (2) et d'une ouverture (3) recevant un échantillon; un canal de mesure (4) pourvu d'une partie optique (5), d'un photomètre (6), éventuellement d'un élément (7) atténuant la lumière, et éventuellement d'un filtre (8); un canal de référence (14) pourvu d'une partie optique (15), d'un photomètre (16), éventuellement d'un élément (17) atténuant la lumière, et éventuellement d'un filtre (18); et un dispositif de calcul et de traitement (20¿s?, 20¿c?) de signaux servant à traiter et à comparer les valeurs d'intensité lumineuse observées au moyen des photomètres dans les canaux de mesure et de référence. Ledit instrument de mesure comporte au moins une source de lumière visible (2¿s?) émettant sensiblement de la lumière dont la longueur d'onde est majoritairement supérieure à environ 380 nm, et une source de lumière ultraviolette (2¿u?) émettant sensiblement de la lumière comprise dans la gamme ultraviolette et dont la longueur d'onde est majoritairement inférieure à environ 380 nm, et de préférence comprise entre 300 et 380 nm.

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