Measuring tip for high frequency measurement

Details Measuring tip for high frequency measurement Measuring tip for high frequency measurement

G - Physics

01

R

G01R 1/067 (2006.01)

Patent

CA 2589353

The invention relates to a contact arrangement, especially for a measuring probe or a measuring head, for measuring high frequency, especially on a semiconductor wafer. Said arrangement comprises a contact end (12) for electrically contacting planar structures. A coplanar conductor structure having at least two conductors (14) carried by a dielectric (10) is provided at the contact end (12). Between the dielectric (10) and the contact end (12), the measuring tip is configured in such a manner that the conductors (14) of the coplanar conductor structure are disposed in mid-air and in a resilient manner in relation to the dielectric (10) retaining them. The invention is characterized in that the dielectric (10) is provided with at least one arrangement (24) for transmitting electrical signals, said arrangement being electrically connected to at least one conductor (14) of the conductor structure in such a manner that the arrangement (24) transmits signals from the at least one conductor (14) that is electrically connected to the arrangement (24).

L'invention concerne un ensemble de contact, notamment une sonde ou une tête de mesure haute fréquence, en particulier sur une tranche de semi-conducteur, cet ensemble comprenant une extrémité (12) côté contact pour le contact électrique de structures planes. Sur l'extrémité (12) côté contact est disposée une structure conductrice coplanaire dotée d'au moins deux conducteurs (14) supportés par un diélectrique (10). Entre le diélectrique (10) et l'extrémité (12) côté contact, la pointe de mesure est conçue de telle manière que les conducteurs (14) de la structure conductrice coplanaire sont disposés de manière élastique librement dans l'espace et relativement au diélectrique (10) support. L'invention est caractérisée en ce que sur le diélectrique (10) se trouve au moins un ensemble (24) pour transmettre des signaux électriques, cet ensemble étant en liaison électrique avec au moins un conducteur (14) de la structure conductrice coplanaire, de sorte que ledit ensemble (24) transmet des signaux du conducteur (14) électriquement relié à l'ensemble (24).

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