Mechanical resonance, silicon accelerometer

Details Mechanical resonance, silicon accelerometer Mechanical resonance, silicon accelerometer

G - Physics

01

P

G01P 15/00 (2006.01) G01P 15/02 (2006.01) G01P 15/097 (2006.01) G01P 15/10 (2006.01)

Patent

CA 2213245

A silicon accelerometer includes several silicon layers. The silicon layers form two silicon beams supported by flexure members. An accelaration responsive silicon mass is arranged to bend the flexure members in response to accelerations. The silicon beams are vibrated in vacuum chambers and gas damping is provided for the acceleration responsive mass and the flexure members. Sensing electronics detect vibration of the two silicon beams.

Un accéléromètre au silicium comprend plusieurs couches de silicium. Les couches de silicium constituent deux lames de silicium supportées par des éléments de flexion. Une masse de silicium sensible à l'accélération est conçue pour incurver les éléments de flexion en réaction aux accélérations. Les lames de silicium sont soumises à des vibrations dans des chambres à vide et la masse sensible à l'accélération, ainsi que les éléments de flexion sont amortis par gaz. Des dispositifs électroniques de détection détectent la vibration des deux lames de silicium.

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