Mechanical resonator arrangements

Details Mechanical resonator arrangements Mechanical resonator arrangements

G - Physics

01

L

356/200, 349/56.

G01L 1/22 (2006.01)

Patent

CA 1125442

ABSTRACT OF THE DISCLOSURE An accelerometer including a block having a comb-like array of three cantilever beans with a semiconductor filament fixed in tension between each adjacent pair. The array has a central cantilever longer than the other two.

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