Mechanical resonator arrangements

Details Mechanical resonator arrangements Mechanical resonator arrangements

H - Electricity

01

L

356/200

H01L 49/00 (2006.01)

Patent

CA 1143870

J. C. Greenwood 29B MECHANICAL RESONATOR ARRANGEMENTS ABSTRACT OF THE DISCLOSURE A semiconductor transducer device including a body formed from a single crystal semiconductor material and having at least one flexible portion vibratable in response to applied mechanical force. The flexible portion is then maintained in tension whether or not vibrating.

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