Mechanical resonator arrangements

Details Mechanical resonator arrangements Mechanical resonator arrangements

H - Electricity

04

R

349/67.8

H04R 17/10 (2006.01)

Patent

CA 1131760

ABSTRACT A multi-element semiconductor mechanical resonator comprises a rectangular silicon body formed from a single crystal having a transverse valley across its width. A comb-like array of flexible silicon cantilevers extend from one end of the body and each is adapted to respond to a periodic force such that each has a different vibrational frequency.

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