Mechanical sensor for high temperature environments

Details Mechanical sensor for high temperature environments Mechanical sensor for high temperature environments

G - Physics

01

L

356/200, 73/3

G01L 1/18 (2006.01) G01L 9/00 (2006.01) H01L 29/84 (2006.01)

Patent

CA 1330714

MECHANICAL SENSOR FOR HIGH TEMPERATURE ENVIRONMENTS ABSTRACT OF THE DISCLOSURE A force or pressure sensor includes a monocrystalline silicon diaphragm coated with silicon dioxide upon which single crystalline silicon resistors are fused in a low profile pattern on the surface. The resistors are almost perfectly electrically isolated from each other and from the underlying silicon substrate. The structure is fabricated by forming resistors in a first wafer and then affixing that surface of the first wafer to the silicon dioxide layer on the second wafer. All of the first wafer except for the resistors has been removed, and metal contact capable of resisting elevated temperatures are formed to provide electrical connections to the resistors.

598135

Affiliated with

Also associated with

Rating

Mechanical sensor for high temperature environments does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Mechanical sensor for high temperature environments, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mechanical sensor for high temperature environments will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1169438