Mechanically stable field emission gun

Details Mechanically stable field emission gun Mechanically stable field emission gun

H - Electricity

01

J

H01J 3/38 (2006.01) H01J 37/073 (2006.01) H01L 21/027 (2006.01)

Patent

CA 2086976

MECHANICALLY STABLE FIELD EMISSION GUN Mark A. Gesley Daniel B. DeBra ABSTRACT OF THE DISCLOSURE An improved electron or ion gun support structure includes a hollow cylinder for rigidly connecting the source assembly to the source-motion ring, with the source cathode and associated lens extending into the hollow portion of the cylinder. The gun is thus made very stable and less susceptible to outside vibrations.

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