Media isolated differential pressure sensors

Details Media isolated differential pressure sensors Media isolated differential pressure sensors

G - Physics

01

L

73/70

G01L 7/08 (2006.01) G01L 9/00 (2006.01) G01L 9/06 (2006.01) G01L 13/02 (2006.01) G01L 19/04 (2006.01)

Patent

CA 1300925

ABSTRACT OF THE DISCLOSURE A deflecting ?iaphragm differential pressure sensor is formed so all electrical elements and connections from external circuitry to the sensor are isolated from the pressure media. The deflecting, pressure sensing diaphragm is made of a semi-conductor material, having piezoresistors disposed on a surface thereof to form strain gages to sense deflection of the diaphragm. The strain gage resistors are media isolated by a layer that overlies the strain gage resistors. All forms of the invention provide environmental protection for the electrical connections for external circuitry, which are subject to corrosion from the pressure media.

543028

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