Melt dispensing liquid phase epitaxy boat

Details Melt dispensing liquid phase epitaxy boat Melt dispensing liquid phase epitaxy boat

H - Electricity

01

L

356/189

H01L 21/02 (2006.01) C30B 19/06 (2006.01) C30B 19/10 (2006.01)

Patent

CA 1201220

MELT DISPENSING LIQUID PHASE EPITAXY BOAT Abstract of the Disclosure An improved melt dispensing liquid phase epitaxy (LPE) boat is disclosed. It comprises two separable compartments. A supply-melt reservoir and a growth-melt bin separable by means of a separation slider for separating the two compartments prior to the actual process of epitaxial growth. In a further improvement, the substrate holder has a melt collection bin for receiving used growth-melt. - i -

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