Membrane deformographic display, and method of making

Details Membrane deformographic display, and method of making Membrane deformographic display, and method of making

H - Electricity

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H01L 33/00 (2006.01) C09G 3/00 (2006.01) C09K 11/06 (2006.01) G09F 9/33 (2006.01) G09F 9/37 (2006.01) H05B 33/14 (2006.01) H05B 33/28 (2006.01)

Patent

CA 1100614

A MEMBRANE DEFORMOGRAPHIC DISPLAY, AND METHOD OF MAKING ABSTRACT OF THE DISCLOSURE A deformographic membrane display system in which a semiconductor substrate, for example silicon, has an insulating layer such as SiO2 formed thereon with an array of holes formed in the insulating layer. Alternatively, the insulating layer may be omitted, with the holes being formed in the substrate. A reflec- tive membrane, including a thin metal layer, is formed over the surface in which the holes are formed. Electrodes are formed in the silicon substrate directly beneath or in each of the holes. Control circuitry, which for example, may be formed utilizing metal oxide semiconductor field effect transistor (MOSFET) technology and/or bipolar technology, is formed in the silicon substrate for selectively energizing the electrodes. The portion of the membrane over a given hole is deformed in response to the electrode thereunder being energized by the control circuitry.

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