Mems actuators and switches

Details Mems actuators and switches Mems actuators and switches

H - Electricity

01

H

H01H 3/00 (2006.01) B81B 3/00 (2006.01) B81B 5/00 (2006.01) B81B 7/02 (2006.01) H01H 3/02 (2006.01)

Patent

CA 2679219

The microelectromechanical (MEMS) switches employ movable actuators wherein one can move perpendicular to an underlying substrate and one or more others can move in a direction substantially parallel to the underlying substrate. Methods of operating MEMS switches are also disclosed. The improvements can enhance the performance of MEMS switches and/or reduce their manufacturing costs.

Selon l'invention, les commutateurs microélectromécaniques (MEMS) utilisent des actionneurs mobiles, l'un pouvant se déplacer perpendiculairement à un substrat sous-jacent et un ou plusieurs autres pouvant se déplacer dans une direction sensiblement parallèle au substrat sous-jacent. L'invention concerne également des procédés d'actionnement de commutateurs à MEMS. Les perfectionnements peuvent améliorer la performance des commutateurs MEMS et/ou réduire leurs coûts de fabrication.

Affiliated with

Also associated with

Rating

Mems actuators and switches does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Mems actuators and switches, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mems actuators and switches will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1976075