Mems-based capacitive sensor

Details Mems-based capacitive sensor Mems-based capacitive sensor

G - Physics

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V

G01V 1/18 (2006.01) B81B 7/00 (2006.01) G01P 15/00 (2006.01) G01V 1/16 (2006.01) G01V 1/28 (2006.01)

Patent

CA 2743088

An apparatus includes a seismic acquisition system that includes an accelerometer. The accelerometer includes a capacitive MEMS-based sensor, a controller and a charge amplifier. The sensor includes a proof mass; input terminals to receive a first signal; and an output terminal that is electrically connected to the proof mass to provide a second signal. The first signal, which is regulated by the controller, controls an equilibrium restoring force for the sensor and causes the sensor to provide the second signal. The charge amplifier provides a third signal, which is indicative of a position of the proof mass. The charge amplifier has an input terminal to continuously receive the second signal during a time in which the first signal controls the equilibrium restoring force and causes the sensor to provide the second signal.

L'invention concerne un appareil comprenant un système d'acquisition sismique comportant un accéléromètre. L'accéléromètre comprend un capteur capacitif de type MEMS, un dispositif de commande et un amplificateur de charge. Le capteur comprend une masse étalon, des bornes d'entrée recevant un premier signal, et une borne de sortie connectée électriquement à la masse étalon pour délivrer un second signal. Le premier signal, qui est régulé par le dispositif de commande, régule une force de rétablissement de l'équilibre du capteur et amène le capteur à délivrer le second signal. L'amplificateur de charge fournit un troisième signal qui indique une position de la masse étalon. L'amplificateur de charge est muni d'une borne d'entrée lui permettant de recevoir le second signal en continu pendant un laps de temps pendant lequel le premier signal régule la force de rétablissement de l'équilibre et amène le capteur à délivrer le second signal.

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