Mems device having deformable membrane characterized by...

G - Physics – 02 – B

Patent

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G02B 26/00 (2006.01)

Patent

CA 2578468

An interferometric modulator is provided having a faster deformation time constant on actuation than relaxation time constant upon release from actuation. In some embodiments, apertures are formed in a mechanical membrane to decrease pressure, including liquid and/or gas pressures, on the membrane when actuated. In other embodiments, a dampening layer is disposed in close proximity above the membrane to apply greater downward pressure on the membrane and therefore slow the motion of the membrane when released from an actuated state. Other embodiments comprise structures, such as a heating element or vacuum device, to manipulate pressures above and/or below the mechanical membrane to affect the mechanical persistence of the display device.

L'invention concerne un modulateur interférométrique possédant une constante de temps de déformation en phase de contrainte plus rapide que la constante de temps de relâchement lorsque la contrainte n'est plus appliquée. Dans certains modes de réalisation, des ouvertures sont formées dans une membrane mécanique pour réduire la pression, y compris la pression liquide et/ou gazeuse, sur la membrane, lorsque cette dernière est soumise à la contrainte. Dans d'autres modes de réalisation, une couche d'amortissement est disposée à proximité de la membrane, au-dessus de cette dernière, pour appliquer une plus grande pression vers le bas sur la membrane et, ainsi, ralentir le mouvement de la membrane lorsque la contrainte n'est plus appliquée. D'autres modes de réalisation comprennent des structures, telles qu'un élément chauffant ou un dispositif à vide, permettant de modifier la pression au-dessus et/ou au-dessous de la membrane mécanique pour modifier la résistance mécanique du dispositif d'affichage.

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