Mems device with an angular vertical comb actuator

Details Mems device with an angular vertical comb actuator Mems device with an angular vertical comb actuator

G - Physics

02

B

G02B 26/02 (2006.01) B81B 7/02 (2006.01)

Patent

CA 2624400

A vertical comb electro-static actuator for rotating a micro-electro- mechanical micro-mirror device about a tilt axis or rotation. The rotor comb fingers of the comb drive extend from a sub-frame of the micro-mirror, which includes a prestressed layer for bending the rotor comb fingers at an angle to the substrate and mirrored platform, enabling the platform, the hinges, the rotor comb fingers and the stator comb fingers to be formed in the same layer, i.e. the same etching step.

Affiliated with

Also associated with

Rating

Mems device with an angular vertical comb actuator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Mems device with an angular vertical comb actuator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mems device with an angular vertical comb actuator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1963670