Mems display devices and methods of fabricating the same

G - Physics – 02 – B

Patent

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G02B 26/08 (2006.01)

Patent

CA 2694044

MEMS devices include materials which are used in LCD or OLED fabrication to facilitate fabrication on the same manufacturing systems. Where possible, the same or similar materials are used for multiple layers in the MEMS device, and use of transparent conductors for partially transparent electrodes can be avoided to minimize the number of materials needed and minimize fabrication costs. Certain layers comprise alloys selected to achieve desired properties. Intermediate treatment of deposited layers during the manufacturing process can be used to provide layers having desired properties.

L'invention concerne des dispositifs MEMS comprenant des matériaux qui sont utilisés dans la fabrication de LCD ou OLED pour faciliter la fabrication sur les mêmes systèmes de fabrication. Lorsque cela est possible, des matériaux identiques ou similaires sont utilisés pour plusieurs couches dans le dispositif MEMS et l'utilisation de conducteurs transparents pour des électrodes partiellement transparentes peut être évitée pour minimiser le nombre de matériaux nécessaires et minimiser les coûts de fabrication. Certaines couches comportent des alliages choisis pour obtenir les propriétés souhaitées. Un traitement intermédiaire des couches déposées pendant le processus de fabrication peut être utilisé pour fournir des couches ayant les propriétés souhaitées.

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