G - Physics – 02 – B
Patent
G - Physics
02
B
G02B 26/08 (2006.01) B81B 5/00 (2006.01) G02B 6/35 (2006.01)
Patent
CA 2328713
A microelectromechanical structure capable of switching optical signals from an input fiber to one of two or more output fibers. In one embodiment, the MEMS optical cross-connect switch comprises a first microelectronic substrate having a pop- up mirror disposed on the surface of the substrate and a rotational magnetic field source, such as a variably controlled magnetic field source. The rotational magnetic field source allows for reliable actuation of the pop-up mirror from a non-reflective state to a reflective state. Additionally the invention is embodied in a MEMS optical cross-connect switch having a first microelectronic substrate having a pop-up mirror disposed on the surface of the substrate and a positioning structure disposed in a fixed positional relationship relative to the first substrate. The positioning structure may comprise a positioning structure extending from a second microelectronic substrate that is in a fixed positional relationship relative to the first microelectronic substrate. The positioning structure serves to restrict further movement of the pop-up mirror when the pop-up mirror has been actuated into a reflective state. Additionally, the positioning structure may be electrostatically activated through a voltage source connected to the second substrate such that electrostatic activation of the positioning structure causes the pop- up mirror to be "locked" in the reflective state. The invention is also embodied in an optical cross- connect switch array of multiple pop-up mirrors and positioning structures. Additionally, the invention is embodied in an optical cross-connect switch system having one or more optical fiber inputs and two or more optical fiber outputs. Methods for conducting optical cross-connect switching and fabrication methods are also provided.
Hill Edward A.
Mahadevan Ramaswamy
Wood Robert L.
Cronos Integrated Microsystems Inc.
Memscap S.a.
Sim & Mcburney
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